ASML passes major EUV milestone

EUV will help put the

AMSL passes major EUV milestone

ASML passes major EUV milestone

For years many people have stated that Moore's Law is dead, or at least that it is slowing down, with the time gap between process nodes increasing that the complexity and cost of each jump reaching astronomical levels. 
ASML (Advanced Semiconductor Materials International) is one of the few companies in the world that are truly driving process technology further, with their EUV technology continuing to meet industry targets despite many naysayers that claimed that the technology was nigh impossible it implement within the industry at affordable levels. 

Now the company has created and demonstrated a 250-watt EUV source, with source power being indicative of the number of EUV photons that are exposed to a scanner for wafer exposure and as such is related to the device's productivity. This source will allow EUV machines to work through 125 WPH (wafers per hour), which many said was the barrier that needed to be passed to make the technology viable for profitable industrial applications.  

Leading chip makers like Samsung, GlobalFoundries, TSMC and Intel all plan on integrating this technology into their future process nodes, with the extra accuracy provided by EUV allowing for higher resolution lithography. This will, in turn, allow denser more accurate process nodes to be created. With this latest innovation, AMSL's machines will also be able to work through enough silicon wafers to be profitable, despite the fact that EUV tooling will cost around $100 million each.   

Despite the huge costs of EUV, the technology is expected to prove more economic than today's triple or quadruple patterning techniques, as EUV will now be able to benefit from faster cycle times and fewer chances of wafer defects. 


AMSL passes major EUV milestone  


ASML currently has a backlog of 27 EUV systems, which in total has a value of over 2.8 Billion Euros. A large number of these machines have been purchased by Intel, to help maintain their process node leadership. 

Back in 2012, the company was only able to create EUV technology that offered a mere 25W source power, marking a 10X increase over the past five years. Now EUV is set to become relevant within silicon manufacturing, with AMSL expecting a further €2.2 Billion in sales next quarter.


You can join the discussion on AMSL's EUV achievements on the OC3D Forums


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Most Recent Comments

19-07-2017, 13:30:58

Intel outsourcing and buying tools for there Fabs? Must be truly impressive for that to happen. Considering Intel are the world leaders and all.Quote

19-07-2017, 13:36:30

Originally Posted by NeverBackDown View Post
Intel outsourcing and buying tools for there Fabs? Must be truly impressive for that to happen. Considering Intel are the world leaders and all.
Intel doesn't make all of their equipment, no company stands alone after all. Developing everything from the ground up would get them nowhere and require multiple billions in R&D.

It isn't EUV alone that will make a good process node, it is all about how well it is utilised. Most major fabs plan on moving to EUV soon for later 7nm series processes and below, so it really is going to be a war over who can make the best "next-generation" process.Quote

19-07-2017, 13:44:45

I know they don't make it all, my girlfriends great uncle used to work for Intel and he was the guy who personally bought all the stuff for Intel that they did not make. Did other things to that he still isn't able to talk about... I ask him all the time. Never get an answer

I'm just saying in this situation for Intel to be buying a WHOLE SET of tools from one company and using them pretty much exclusively is the impressive part for ASML. We know EUV will get used right by Intel. They are the world leaders still like I said. It just depends now if someone can do it better but I don't think that'll happen at first. It's also hard to gauge considering Intel and AMD make high performance chips whereas Samsung makes low power ones. So not directly comparable, thus, hard to tell who's is betterQuote

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